ABSTRACT
When sample A was irradiated by a focused electron beam, expansion of the surface occurred without density preservation. The electron beam did not produce grooves in the vicinity of the patterns in the way that was reported in AS2S3 and GeS2 by Tanaka (1997). The expansion reached values up to 30% of the original thickness and it was detected when either pulsed or continuous mode electron irradiation was used. Fig. la and Fig. lb plot the change in thickness and width respectively of the patterns with time exposure for different accelerating voltages when the electron beam current was fixed at 0.5 nA and pulse mode was used.
