ABSTRACT
Abstract: In the development ofMEMS devices, the questions arise of whether or not to integrate and whieh technology should be used. Choosing the non-integrating option givcs more processing ti-eedom but may limit the possibilities of adding new functions in the system. Taking the integrated option, which combines sensor and electronics on a single chip, it is preferable to use existing processes or layers to fabricate the sensor. If not possible. the number of additional steps should be minimised. The additional process steps should be compatible with the electronics. In this paper the development of MEMS technology will be discussed taking into account the application and the integration possibilities.
