ABSTRACT
The vigorous development of microsystems is largely attributed to microelectronics achievements, since the invention and commercialization of the very large scale integrated circuit provided manufacturing platforms for miniaturized integrated systems. Micromanufacturing is one of the essential technologies in microsystems. The whole manufacturing process of microsystems, which includes chip fabrication, integration and assembly, and packaging and testing, is much more complicated than those of integrated circuits. Miniaturized, multifunctional, portable and low-cost radio frequeucy devices have become the key for promotion and application of wireless communication as well as the important application domain of microsystems technology. Microelectronics packaging, which accounts for 90% of the microsystems packaging market share, is an important and fundamental part of microsystems packaging technology. Microsystems products have reached every field of the national economy. The importance of microsystems packaging technology is reflected in multiple levels and aspects. The chapter also presents an overview of the key concepts discussed in this book.
