ABSTRACT
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Integrated circuits (ICs) have dramatically changed the world in the past few decades by facilitating technologies such as computers and cell phones. The drivers of IC innovations have been cost and functionality. Following this trend toward smaller size, lower cost, higher performance and more functions, a new –eld, microelectromechanical systems, or MEMS, gradually developed in the 1980s. The best-known MEMS device in the early days of the MEMS –eld was the micromotor. Though they did not live up to the initial expectations, MEMS micromotors inspired numerous researchers to work on MEMS.
