ABSTRACT
To sense and detect the specišc biological or chemical species is of high signišcance [1-4] because such sensing and/or detection are correlated with early diagnosis of diseases such as cancers and/or screening of toxicity in the environment. The past decade has witnessed the emergence of microelectromechanical system (MEMS)/ nanoelectromechanicalsystem (NEMS) devices [2,5], which allow the label-free detection of specišc biological or chemical species. Among such devices, micro-/ nanomechanical devices such as nanomechanical resonators [6] have received alot
10.1 Introduction .................................................................................................. 331 10.2 Conventional Detection Principles ............................................................... 334
10.2.1De°ection-Based Detection .............................................................. 334 10.2.2Resonance-Based Detection ............................................................. 336
10.3Experimental Works on Resonance-Based Detection .................................. 337 10.4 Continuum Mechanics Model-Based Detection Principles ......................... 342
10.4.1Mass Effect versus Stiffness Effect .................................................. 343 10.4.2Surface Stress Effects ....................................................................... 345
10.4.2.1One-Dimensional Beam Model: Gurtin’s Argument ......... 347 10.4.2.2Three-Dimensional Elastic Model: Plate Model ............... 350 10.4.2.3 Surface Elasticity ............................................................... 352
10.4.3Perspectives ...................................................................................... 353 10.5Multiscale Modeling Approaches ................................................................. 354
10.5.1Cantilever-Based Molecular Detection ............................................. 355 10.5.2Carbon Nanotube Resonator-Based Detection ................................ 359 10.5.3 Perspectives ...................................................................................... 362
10.6 Outlook and Perspectives ............................................................................. 363 Acknowledgments .................................................................................................. 365 References .............................................................................................................. 365
of attention due to their capability of highly sensitive detection of specišc molecules (or atoms) even atsingle-molecule (atomic) resolutions [7-10]. Further, mechanicalresonators are able to quantify the target molecules, for example, their masses [7-10], which implies that nanomechanical resonators are appropriate for not only sensitive label-free detection but also weighing of target molecules [11].
