ABSTRACT
Nanoscale TE materials, using phonon-blocking, electron-transmitting structures [28] employing thin-›lm superlattices [2,25] and quantum-dot superlattices [3,5,29] are typically deposited by molecular beam epitaxy (MBE) [3,5] or metallorganic chemical vapor deposition (MOCVD) [2,30] or chemical vapor deposition (CVD). šermal evaporation, which are low cost and can be done in moderately high vacuum environment (~1e-6 to 1e-7 Torr), have also been successfully used to produce obtain highquality (Bi2Te3)/Bi2(Te,Se)3 superlattices using element sources [31] and PbTe/PbTeSe superlattices [32] from high-purity PbTe and PbSe bulk materials.
