ABSTRACT
Ultraviolet radiation (UV) has been employed since 1960 to remove adsorbed hy drocarbons from metal and glass surfaces. In 1972, Bolon and Kunz [1] recog nized that enhanced cleaning occurred in the presence of ozone (0 3) when con taminated surfaces were irradiated using wavelengths less than 300 nm. The resulting decomposition products were carbon dioxide and water. Auger electron
spectroscopy (AES) revealed that no organic surface residues were evident, only inorganic deposits. Later Vig and Lebus [2] demonstrated that a combination of UV and 0 3 cleaning produced carbonaceous-free surfaces in less than 1 minute.
