Abstract-New cyclic azasilanes have been synthesized with the purpose of developing coupling agents appropriate for a variety of nanotechnologies including surface modification of nanoparticles and chemical vapor deposition (CVD) consistent with nanoscale features. A facile method for the formation of Si-N bonds which comprises heating aminoalkoxysilanes in the presence of a neutral ammonium salt catalyst has been developed. Compounds ranging from simple azasilacyclopentanes to pentacoordinate azasilacycloctanes, as shown below, were prepared.