Abstract-Aluminum, titanium and zirconium play a major role in industrial applications where environmental stability and surface functionalization are important. We are studying the adsorption of hydrogenated and fluorinated phosphates on these materials to determine their potential as corrosion inhibiting coatings, adhesion promoters, or anti-stiction modifiers. In this paper we compare and contrast methods of phosphate deposition as well as different adsorbates and substrates primarily using infrared spectroscopy and solid state nuclear magnetic resonance. We show that sonication can be used to enhance the homogeneity of organophosphate films adsorbed on aluminum oxide surfaces. For titanium, zirconium and Zircaloy-2 surfaces, the amount of adsorbed phosphate increases due to sonication for one species studied but decreases for the other. This indicates that the type of phosphate, the type of substrate and the deposition method all play a role in determining the adhesion of these films to industrially relevant surfaces.