ABSTRACT
With the trend of device miniaturization and integration, the realization of three-dimensional controllable microstructures and functional devices was highly desirable because of their wide applications in micro-optical systems, micromachines, lab-on-a-ship, and integrated MEMS (Micro Electro Mechanical Systems) systems. However, conventional microfabrication technology is not suitable for preparing true three-dimensional (3D) microstructures. Femtosecond laser direct writing, as a kind of advanced 3D microfabrication technique, could realize arbitrary 3D microstructures by point-to-point scanning. In this chapter we will
introduce the recent progress of three-dimensional functional devices by means of two-photon-induced photopolymerization, mainly on high-precision micro-optical devices, functional micromachines, and 3D microfluidic devices.
