Cost analysis calculations can be readily undertaken using a conven-

tional spreadsheet package, such as Microsoft Excel. MEMSCOST is

one such spreadsheet, developed by the author and used for all the

calculations in this book. MEMSCOST originates from the author’s

efforts in the 1990s to establish the cost of microelectromechanical

systems (MEMS) fabrication at the research and development (R&D)

stage. Within the last five years, the capability of MEMSCOST has

beenmuch expanded. It includes a family of high-aspect-ratio (HAR)

processes and other MEMS fabrication techniques particularly

relevant to the industry, along with device testing and packaging