This chapter will detail the equipment and processes that have been

specifically developed for microelectromechanical systems (MEMS)

fabrication and address the issue of the relative magnitude of the

forces acting on the microstructures. MEMS devices differ from

semiconductors in that the microstructures require attention not

only to the planar or x-y dimensions but also to the z-dimension or depth. Many materials must be selected for their mechanical rather

than electrical properties.