ABSTRACT
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… controlling motion parameters and compensating for errors
Precision control is one of the core issues required by ultraprecision machines discussed previously. A well-chosen control strategy will enable a complete control of the mechanical system to achieve a better positioning and often compensate for errors either implicitly [1] or explicitly as it will be explained in the subsequent chapters. The fi eld of high-precision actuators is now an interesting subject of research worth spending millions of dollars annually. Precision control discussed here refers to control of motion parameters of the order of micrometer or better.
