ABSTRACT
The deposition of thin fi lms has several attractive features, namely ● large active areas; ● low consumption of material; ● low deposition temperatures, and hence the possibility of using low-cost sub-
strate materials.
The deposition of thin fi lms has several attractive features, namely ● large active areas; ● low consumption of material; ● low deposition temperatures, and hence the possibility of using low-cost sub-
strate materials.