ABSTRACT

Advanced developments in microelectronic and optoelectronic devices, photovoltaic (PV) cells, and power devices for electric vehicles are required to improve the quality of our life in the information, energy production, and energy-saving elds. Single-crystal silicon, having widely been used in applications such as computers, solar cells, and inverters in power devices, is one of the key materials to realize these goals due to its low-cost and high quality. To realize these improvements, there is the need to grow silicon crystals with an even lower concentration of impurities (including oxygen and carbon), dislocations and point defects in the material grown today.