ABSTRACT
In this chapter we will cover some of the important aspects of wafer probing. The term wafer probing is almost self-explanatory-it is basically probing the circuits on a semiconductor wafer to measure their electrical performance. The integrated circuit (IC) revolution gave rise to some of the innovative developments across the field of microwave engineering. Concepts that once were thought next to impossible have become a reality today. Concepts have emerged into products. Commercial sophisticated wafer probing systems have not only made their way to numerous research and development laboratories and institutes across the globe, but also become a valued tool in the semiconductor industry as well.
