ABSTRACT

In order to use plasma for any applications, in particular for textiles, it is essential to understand the interactions of plasma with the substrate. Bombardment of ions, electrons and high energy neutrals take place on the surface and interactions are very complex. This results in the alteration of surface chemistry and topography. In case of non-polymerizing/polymerizing gases, four different types of interactions take place (Yasuda, 1985; Clark, 1978), which are as follows:

6.3.1 Surface cleaning (removal of contaminants) The first step of plasma processing is cleaning of surfaces. It is believed that the interaction of ions, electrons, and energetic species of neutral atoms causes rapid removal of low molecular weight contaminants such as oligomers, additives, loosely bound material, some residuals, ubiquitous contaminants, processing aids, grease, dirt, and adsorbed species, which is also called as “plasma cleaning.”