ABSTRACT
Among the pressure sensors that are widely used in the industry, capacitive pres-
sure sensors are particularly noteworthy. These sensors are characterized by very
low temperature hysteresis and pressure hysteresis, in addition to low power con-
sumption [1-8]. Traditional capacitive pressure sensors, however, suffer from inher-
ently poor resolution (a typical capacitive pressure sensor offers a total change in
capacitance of only a few pico-farads, which usually necessitates the use of a sophis-
ticated interface/compensation circuit to sense the very small variations in capaci-
tance). New capacitive pressure sensors with extremely high resolution and sensitiv-
ity, based on nanotechnology, were introduced recently [9]. This section introduces
the mercury droplet capacitive pressure sensor, the sensor with the highest reported
sensitivity and resolution. This type of sensor is currently in production and should
be commercially available in early 2015.
