ABSTRACT
In the book, the significant advances and technical details have been described. An overview of the history of cluster beam technology has been presented for the purpose of illustrating the differences, and often the uniqueness, of cluster ion beam technology relative to other ion beam techniques. This book illustrates how early ion beam discoveries led to the development of traditional ion implantation technology during the second half of the twentieth century, and explains how early discoveries related to supersonic nozzles and gas condensation led to the creation of gas cluster beams. The knowledge of how cluster ion beam technology has been developed will provide valuable contributions to support further advances in the future.
