ABSTRACT
Microelectromechanical system (MEMS) is basically a technology used to create tiny integrated devices that combine mechanical and electrical components. MEMS is interdisciplinary in nature, which has a wide and diverse range of technical areas including integrated circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging. MEMS consists of mechanical microstructures, microsensors, microactuators and microelectronics, all integrated onto the same silicon chip. One portion of MEMS devices operating as actuators or sensors for biochemical processes and instrumentation is called BioMEMS. Current MEMS devices include accelerometers for air bag sensors, inkjet printer heads, computer disk drive read/write heads, projection display chips, blood pressure sensors, optical switches, microvalves, biosensors and many other products that are all manufactured and shipped in high commercial volumes. In MEMS technology, popularity of silicon is mainly due to its abundant nature and ease of production and manipulation.
