ABSTRACT
The basic building block of Microelectromechanical system (MEMS) devices is the substrate which is nothing but an object with macroscopic surface finish. In semiconductor electronics, the substrate is nothing but a slice of single crystal silicon (Si) which is commonly known as wafer. From the technical point of view, the use of semiconductor as substrate material confers the integration of MEMS and complementary metal oxide semiconductor structures into a truly monolithic device which is highly challenging. Single-crystal Si is the principal material in the semiconductor industry. he polymers can also be used as substrate materials in MEMS and microsystems technology. Si is an ideal substrate material for MEMS. Si is the most abundant material on earth. Most of the time, it is found in compounds with other elements as a mixture. Si is dominant as a substrate for MEMS, but research and development is ongoing with other non-semiconductor substrate materials including metals, glasses, quartz, crystalline insulators, ceramics and polymers.
