ABSTRACT
In this chapter, the interaction of gas atoms and molecules with surfaces is studied using computer simulation. Classical molecular dynamics (MD) was applied for simulation of a fast atom collision with a surface, and the probability of a gas atom to be captured by the wall (sticking coefficient) was calculated. We begin with a broad review of analytical and numerical calculations of the sticking coefficient of gas atoms and clusters to the surfaces, followed by a discussion of the deposition of small metal clusters on surfaces. Collision and surface sputtering by large energetic clusters is discussed next. The second section addresses cluster formation on solid surfaces. The kinetics of the formation of adsorption layers on solid surfaces based on the atomistic theory of nucleation, given in this section, shows that cluster formation is a significant part of thin film growth on solid surfaces.
