ABSTRACT

The interfacial interaction between high-k dielectrics and graphene plays an important role in determining the growth kinetics of the high-k dielectric thin lms on graphene and also the related electrical properties. In this chapter, we report a recent research progress of integrating high-k dielectrics on graphene, various types of interfacial interactions, and important interfacial properties such as band alignment between graphene and high-k dielectrics. These results provide a detailed understanding of the interface between graphene and high-k dielectrics, and might shed light on tailoring the interfacial properties of graphene-based electronic devices.