ABSTRACT
Inductively coupled plasma mass spectrometry (ICP-MS) not only offers extremely low detection limits in the sub-parts-per-trillion range, but also enables quantitation at the high parts per million levels. This chapter provides an overview of ICP-MS and explains how its characteristic low detection limits. ICP-MS is undoubtedly the fastest-growing trace element technique available today. There are a number of different ICP-MS designs available today that share many similar components, such as nebulizer, spray chamber, plasma torch, interface cones, vacuum chamber, ion optics, mass analyzer, and detector. However, the engineering design and implementation of these components can vary significantly from one instrument to another. In ICP-MS, the plasma torch, which is positioned horizontally, is used to generate positively charged ions and not photons. Once the ions are produced in the plasma, they are directed into the mass spectrometer via the interface region, which is maintained at a vacuum of 1–2 torr with a mechanical roughing pump.
