ABSTRACT
This chapter considers integrated humidity sensors, the development of which is related to the need to solve two problems: (1) improving the control and stabilization of the sensor temperature and (2) reducing the influence of parasitic capacitances. In connection with this, the development of integrated humidity sensors is conducted currently in two directions. That is the development of the humidity sensors integrated with the heater and the monolithic integration of the humidity sensors with the readout circuitry. A detailed description of these approaches, including their advantages and limitations, is given in this chapter. The technologies used in the manufacture of such sensors are also considered.
