The description of an electrophysical pump as an object for planning and for determining an optimal design requires an adequate system of concepts and quantitative characteristics. The substantiation of criteria and the optimization of the geometric structure of electrophysical pumps and pumping systems based on them have become important elements in the planning of vacuum systems. The term criteria for optimizing the geometric structure of electrophysical pumps will be used henceforth for this group. The final parameters of the engineering design are selected, and the principal kinetic and operating characteristics of the pump are calculated. The areas of the sorbing surfaces in some operational models of vacuum equipment and some models that are under construction have already reached tens of square meters, and the tendency for further increases can clearly be perceived. In an optimally designed pump the capture coefficient should have the maximum possible value for a particular gas and a particular sorbing surface.