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Chapter

Nanoscale characterization of stresses in semiconductor devices

Chapter

Nanoscale characterization of stresses in semiconductor devices

DOI link for Nanoscale characterization of stresses in semiconductor devices

Nanoscale characterization of stresses in semiconductor devices book

Nanoscale characterization of stresses in semiconductor devices

DOI link for Nanoscale characterization of stresses in semiconductor devices

Nanoscale characterization of stresses in semiconductor devices book

ByJ Demarest, R Hull, K T Schonenberg, K G F Janssens
BookMicroscopy of Semiconducting Materials 2001

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Edition 1st Edition
First Published 2001
Imprint CRC Press
Pages 4
eBook ISBN 9781351074629

ABSTRACT

A nanoscale technique for the measurement of stresses has been developed for use in crystalline structures of arbitrary complexity. This has been accomplished by quantitative comparison of transmission electron microscopy (TEM) experimental images with simulations of electron diffraction contrast based upon solutions of the Howie-Whelan equations for finite element method (FEM) generated displacement fields. This procedure allows a quantitative determination of stress fields with nanoscale spatial resolution and ±15 MPa stress sensitivity.

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