ABSTRACT
In this paper, a graphene NEM switch with different bridge structures is presented. The design and analysis of the different bridge structure-based graphene NEM switch have studied. The analysis of actuation voltage and total capacitance for various structures has beenperformed using FEM based tool COMSOL Multiphysics. The results show that different bridges have different spring stiffness and get actuated at different actuation voltages. The intact structure-1 has an actuation voltage of 4.43 V while structure-5 requires minimum actuation voltage, i.e. 1.41 V. The overlapping area of the suspended beam is the same in all the cases; hence the total capacitance of 0.66 pF is obtained for all switch structures.
