ABSTRACT
Microelectromechanical systems (MEMS) technology has been a promising technology since the invention of transistors, integrated circuits, and computer chips. This chapter discusses the importance of system integration and summarizing the common components and processes in integrated microfluidic devices. It provides many devices that have used different integration techniques and tools toward specific targets in biomedical engineering. The chapter focuses on the lab-on-a-chip devices in which cell and DNA processing and analysis are performed on a single integrated microfluidic chip. It also provides the reader with information about the most important factors to be taken into consideration when either different parts of a single chip or different processes related to segregated chips are combined to make an integrated MEMS microfluidic device. Valves are designed to control fluid flow and its direction in channels. Pumps are used to provide the necessary force of motion for the fluid flowing in the device.
