ABSTRACT
Microfabrication initially used integrated circuit manufacturing technologies to fabricate objects with well-controlled features that range in size from micrometers to millimeters. Microelectromechanical systems have been primarily based on a silicon platform, as they were developed historically with well-established manufacturing approaches that were used to make integrated circuits. Two of the commonly used fabrication techniques for polymers are molding and embossing, which are well-known techniques in the macroworld of polymers. Advances in microfabrication technology are providing new opportunities for many applications in biology and medicine. The fabrication of microstructures and micropatterns for biomicroelectromechanical systems devices with soft materials such as polymers and gels is sometimes called soft lithography. Micromolding in capillaries is a soft lithographic technique based on a network of microchannels created between a polydimethyl siloxane mold with relief features and a support. High-precision machining with diamond tools provides a cost-effective manufacturing platform for many applications.
